JPS62184191U - - Google Patents

Info

Publication number
JPS62184191U
JPS62184191U JP1986072565U JP7256586U JPS62184191U JP S62184191 U JPS62184191 U JP S62184191U JP 1986072565 U JP1986072565 U JP 1986072565U JP 7256586 U JP7256586 U JP 7256586U JP S62184191 U JPS62184191 U JP S62184191U
Authority
JP
Japan
Prior art keywords
rotating body
sphere
molecular pump
turbo
casing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986072565U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0455276Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986072565U priority Critical patent/JPH0455276Y2/ja
Priority to DE19873716221 priority patent/DE3716221A1/de
Publication of JPS62184191U publication Critical patent/JPS62184191U/ja
Application granted granted Critical
Publication of JPH0455276Y2 publication Critical patent/JPH0455276Y2/ja
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/057—Bearings hydrostatic; hydrodynamic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C39/00—Relieving load on bearings
    • F16C39/02—Relieving load on bearings using mechanical means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP1986072565U 1986-05-16 1986-05-16 Expired JPH0455276Y2 (en])

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1986072565U JPH0455276Y2 (en]) 1986-05-16 1986-05-16
DE19873716221 DE3716221A1 (de) 1986-05-16 1987-05-14 Turbomolekularpumpe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986072565U JPH0455276Y2 (en]) 1986-05-16 1986-05-16

Publications (2)

Publication Number Publication Date
JPS62184191U true JPS62184191U (en]) 1987-11-21
JPH0455276Y2 JPH0455276Y2 (en]) 1992-12-25

Family

ID=13493013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986072565U Expired JPH0455276Y2 (en]) 1986-05-16 1986-05-16

Country Status (2)

Country Link
JP (1) JPH0455276Y2 (en])
DE (1) DE3716221A1 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004079197A1 (ja) * 2003-03-03 2004-09-16 Tadahiro Ohmi 真空ポンプ

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2634829B1 (fr) * 1988-07-27 1990-09-14 Cit Alcatel Pompe a vide
DE19827606A1 (de) * 1998-06-20 1999-12-23 Schlafhorst & Co W Lageranordnung für eine Offenend-Spinnvorrichtung
EP1559914B1 (de) * 2004-01-29 2007-05-09 Pfeiffer Vacuum GmbH Gasreibungspumpe
JP2005344610A (ja) * 2004-06-03 2005-12-15 Boc Edwards Kk 真空排気装置
GB2588146A (en) * 2019-10-09 2021-04-21 Edwards Ltd Vacuum pump

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5191008A (en]) * 1975-02-07 1976-08-10
JPS5612095A (en) * 1979-05-21 1981-02-05 Cambridge Thermionic Corp Turbo molecular vacuum pump
JPS59162396A (ja) * 1983-03-07 1984-09-13 Hitachi Ltd タ−ボ分子ポンプ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1475765A (fr) * 1966-01-31 1967-04-07 Snecma Perfectionnements aux appareils à arbre vertical tournant à grande vitesse
DE2524061C3 (de) * 1975-05-30 1980-04-30 Arthur Pfeiffer-Vakuumtechnik-Wetzlar Gmbh, 6334 Asslar Magnetisch gelagerte Turbovakuumpumpe mit Fanglager

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5191008A (en]) * 1975-02-07 1976-08-10
JPS5612095A (en) * 1979-05-21 1981-02-05 Cambridge Thermionic Corp Turbo molecular vacuum pump
JPS59162396A (ja) * 1983-03-07 1984-09-13 Hitachi Ltd タ−ボ分子ポンプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004079197A1 (ja) * 2003-03-03 2004-09-16 Tadahiro Ohmi 真空ポンプ

Also Published As

Publication number Publication date
DE3716221C2 (en]) 1990-05-10
DE3716221A1 (de) 1987-11-26
JPH0455276Y2 (en]) 1992-12-25

Similar Documents

Publication Publication Date Title
JPS62184191U (en])
JPH0220135U (en])
JPH0389994U (en])
JPS63142422U (en])
JPS6359217U (en])
JPS62117286U (en])
JPS63166631U (en])
JPS6226596U (en])
JPS6271417U (en])
JPH0450747U (en])
JPH0387997U (en])
JPH0294918U (en])
JPS62163309U (en])
JPH0176593U (en])
JPH0216821U (en])
JPS6364922U (en])
JPS6238441U (en])
JPS63183497U (en])
JPH01146749U (en])
JPS61181895U (en])
JPS62162419U (en])
JPH0421792U (en])
JPH0283102U (en])
JPS6160992U (en])
JPS61179413U (en])